Surface Micromachined Polymer Capacitive Accelerometer Array Utilizing Fringe Electrical Field

High-resolution continuous-time interface for micromachined capacitive accelerometer

AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.

A wide-range micromachined threshold accelerometer array and interface circuit

This paper presents a complete threshold acceleration detection microsystem comprising an array of threshold accelerometers and a low power interface circuit. The sensors were designed and fabricated using the bulk-silicon dissolved-wafer process. The process offers a wide latitude in sensor threshold levels, as demonstrated in the fabrication of devices with levels of 1.5–1000 g, bandwidths of...

A surface micromachined microtactile sensor array

This paper discusses the design and testing of an eight-by-eight tactile capacitive array sensor for detection of sub-millimeter features and objects, where the entire sensor array is smaller than normal human spatial resolution of 1mm. Each square tactel is less than 100μm on a side, with similar spacing between elements. The structural material was doped polysilicon with an air gap dielectric...

High-resolution micromachined interferometric accelerometer

We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted optical beams. Subangstrom displacements between the proof mass an...