Surface Micromachined Polymer Capacitive Accelerometer Array Utilizing Fringe Electrical Field
نویسندگان
چکیده
منابع مشابه
AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION
A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.
متن کاملA wide-range micromachined threshold accelerometer array and interface circuit
This paper presents a complete threshold acceleration detection microsystem comprising an array of threshold accelerometers and a low power interface circuit. The sensors were designed and fabricated using the bulk-silicon dissolved-wafer process. The process offers a wide latitude in sensor threshold levels, as demonstrated in the fabrication of devices with levels of 1.5–1000 g, bandwidths of...
متن کاملA surface micromachined microtactile sensor array
This paper discusses the design and testing of an eight-by-eight tactile capacitive array sensor for detection of sub-millimeter features and objects, where the entire sensor array is smaller than normal human spatial resolution of 1mm. Each square tactel is less than 100μm on a side, with similar spacing between elements. The structural material was doped polysilicon with an air gap dielectric...
متن کاملHigh-resolution micromachined interferometric accelerometer
We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer consists of surface-micromachined interdigital fingers that are alternately attached to a proof mass and support substrate. Illuminating the fingers with coherent light generates a series of diffracted optical beams. Subangstrom displacements between the proof mass an...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.225